Search results for "Trimethyl phosphate"
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Reaction pathways for atomic layer deposition with lithium hexamethyl disilazide, trimethyl phosphate, and oxygen plasma
2020
Atomic layer deposition (ALD) of lithium-containing films is of interest for the development of next-generation energy storage devices. Lithium hexamethyl disilazide (LiHMDS) is an established precursor to grow these types of films. The LiHMDS molecule can either be used as a single-source precursor molecule for lithium or as a dual-source precursor molecule for lithium and silicon. Single-source behavior of LiHMDS is observed in the deposition process with trimethylphosphate (TMP) resulting in the deposition of crystalline lithium phosphate (Li3PO4). In contrast, LiHMDS exhibits dual-source behavior when combined with O2 plasma, resulting in a lithium silicate. Both processes were characte…
When Chlorides are the Most Reactive: A Simple Route towards Diverse Mono- and Dicationic Dimethyl Phosphate Ionic Liquids
2014
Structurally diverse aromatic and aliphatic ionic liquids have been prepared via anion metathesis utilizing alkylammonium chlorides and trimethyl phosphate. Excellent oxygen-containing functional-group tolerance in preparation of potentially greener dimethyl phosphate ionic liquids has been demonstrated. For the first time, this method has been employed in the synthesis of dicationic imidazolium-based ionic liquids possessing a dimethyl phosphate counterion, providing a simple, direct route towards structurally novel products of high purity.